Open AccessON CORRELATION BETWEEN DIFFUSION RATE OF RADIATION DEFECTS AND DEPTH OF THEIR PENETRATION DURING ION IMPLANTATION
Author(s) -
E. L. Pankratov
Publication year - 2019
Publication title -
journal of materials science and engineering with advanced technology
Language(s) - English
Resource type - Journals
ISSN - 0976-1446
DOI - 10.18642/jmseat_7100122073
Subject(s) - penetration (warfare) , diffusion , radiation , ion implantation , materials science , penetration depth , ion , optics , chemistry , mathematics , physics , thermodynamics , organic chemistry , operations research