Open AccessON THE EFFECT OF SUBSTRATE HEATING ON THE RATE OF GROWTH OF EPITAXIAL LAYERS
Author(s) -
E. L. Pankratov
Publication year - 2019
Publication title -
journal of materials science and engineering with advanced technology
Language(s) - English
Resource type - Journals
ISSN - 0976-1446
DOI - 10.18642/jmseat_7100122054
Subject(s) - epitaxy , substrate (aquarium) , materials science , growth rate , optoelectronics , layer (electronics) , nanotechnology , biology , mathematics , geometry , ecology
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