Open AccessNO GAS DOPING OF ZnO FILMS USING Ir HOT-WIRE IN CATALYTIC REACTION-ASSISTED CHEMICAL VAPOR DEPOSITION
Author(s) -
Ryuta Iba,
Yuki Adachi,
Akihisa Kato,
Keiji Oishi,
Hironori Katagiri,
Kanji Yasui
Publication year - 2019
Publication title -
journal of materials science and engineering with advanced technology
Language(s) - English
Resource type - Journals
ISSN - 0976-1446
DOI - 10.18642/jmseat_7100122042
Subject(s) - chemical vapor deposition , catalysis , materials science , doping , chemical engineering , deposition (geology) , hybrid physical chemical vapor deposition , combustion chemical vapor deposition , nanotechnology , thin film , chemistry , optoelectronics , carbon film , organic chemistry , engineering , paleontology , sediment , biology