Open AccessPLASMA-RELATED GRAPHENE ETCHING: A MINI-REVIEW
Author(s) -
Phuong V. Pham
Publication year - 2019
Publication title -
journal of materials science and engineering with advanced technology
Language(s) - Uncategorized
Resource type - Journals
ISSN - 0976-1446
DOI - 10.18642/jmseat_7100121943
Subject(s) - graphene , plasma , etching (microfabrication) , plasma etching , materials science , nanotechnology , physics , nuclear physics , layer (electronics)