Open AccessINVESTIGATION OF InP GROWTH BANDS BY SELECTIV ELECTROCHEMICAL ETCHING
Author(s) -
J. A. Suchikova,
V. V. Kidalov,
G. A. Sukach
Publication year - 2014
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2010.1.114047
Subject(s) - etching (microfabrication) , electrochemistry , materials science , surface (topology) , sulfur , analytical chemistry (journal) , optoelectronics , optics , mineralogy , nanotechnology , chemistry , metallurgy , geometry , electrode , mathematics , physics , chromatography , layer (electronics)