
A Study on Development of Cleaning Systems for Eliminating Micro-particles
Author(s) -
Tae-Yang Lee,
Ji Han
Publication year - 2018
Publication title -
han'gug gi'gye gi'sul haghoeji/han-guk gigye gisul hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2092-0385
pISSN - 1229-604X
DOI - 10.17958/ksmt.20.1.201802.134
Subject(s) - process engineering , materials science , nanotechnology , engineering