Open AccessMetallic Nanofilms on Single Crystal Silicon: Growth, Properties and Applications
Author(s) -
И. Плюснин
Publication year - 2015
Publication title -
izvestiâ vysših učebnyh zavedenij. materialy èlektronnoj tehniki
Language(s) - English
Resource type - Journals
eISSN - 2413-6387
pISSN - 1609-3577
DOI - 10.17073/1609-3577-2015-2-81-94
Subject(s) - silicon , materials science , substrate (aquarium) , layer (electronics) , deposition (geology) , thin film , nanotechnology , metal , chemical vapor deposition , growth rate , atomic layer deposition , optoelectronics , chemical engineering , metallurgy , geometry , engineering , paleontology , oceanography , sediment , biology , geology , mathematics