Open AccessMonosilane plasma pyrolysis reactor
Author(s) -
Stanislav V. Petrov
Publication year - 2014
Publication title -
eastern-european journal of enterprise technologies
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.268
H-Index - 24
eISSN - 1729-4061
pISSN - 1729-3774
DOI - 10.15587/1729-4061.2014.23395
Subject(s) - silicon , process engineering , materials science , condensation , pyrolysis , process (computing) , chemical engineering , nanotechnology , computer science , engineering , optoelectronics , physics , thermodynamics , operating system