Open AccessEffect on Silicon Nitride thin Films Properties at Various Powers of RF Magnetron Sputtering
Author(s) -
Mohd Kamarulzaki Mustafa,
Uzair Majeed,
Y Iqbal
Publication year - 2018
Publication title -
international journal of engineering and technology
Language(s) - English
Resource type - Journals
ISSN - 2227-524X
DOI - 10.14419/ijet.v7i4.30.22000
Subject(s) - materials science , sputtering , thin film , surface roughness , sputter deposition , silicon nitride , amorphous solid , nitride , silicon , microelectronics , optoelectronics , surface finish , composite material , nanotechnology , crystallography , layer (electronics) , chemistry