Open AccessAZO (ZnO:Al) Transparent Conductive Film Prepared by Plasma Enhanced Chemical Vapour Deposition and its Performances in Comparison with ZnO Film
Author(s) -
Zhaoquan Chen,
Longji Zhu,
Lingli Hong,
Changguo Xue,
Minghai Liu,
Xiaoliang Zheng,
Yelin Hu,
Qiubo Ye,
Xiwei Hu
Publication year - 2014
Publication title -
asian journal of chemistry/asian journal of chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.145
H-Index - 34
eISSN - 0975-427X
pISSN - 0970-7077
DOI - 10.14233/ajchem.2014.17305
Subject(s) - plasma enhanced chemical vapor deposition , substrate (aquarium) , chemical vapor deposition , transmittance , sheet resistance , fabrication , thin film , silicon , deposition (geology) , chemistry , crystallite , chemical engineering , plasma , optoelectronics , materials science , nanotechnology , layer (electronics) , crystallography , paleontology , physics , quantum mechanics , sediment , engineering , biology , medicine , oceanography , alternative medicine , pathology , geology