Open AccessFabrication tolerances of SOI based directional couplers and ring resonators
Author(s) -
Andreas Prinzen,
Michael Waldow,
H. Kurz
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.017212
Subject(s) - resonator , materials science , optics , silicon on insulator , fabrication , waveguide , power dividers and directional couplers , finite element method , slab , optical ring resonators , optoelectronics , silicon , physics , medicine , alternative medicine , pathology , geophysics , thermodynamics
In this work the effect of deviations of the waveguide shape introduced by manufacturing tolerances on the performance of lateral directional couplers and ring resonators based on SOI-rib-waveguides are investigated by using Full Wave 3D Finite Element Method. Beside dimensional deviations like waveguide width and slab thickness for the first time the influence of waveguide sidewall angle and wet chemical cleaning procedures on the device performance are carefully analyzed. Efficient measures against systematic process tolerances are proposed and possible actions to improve device stability and reproducibility are discussed.