Open AccessCrN Films Deposited by Magnetic Field-enhanced Arc Ion Plating
Author(s) -
Yanhui Zhao,
Zhanqi Liu,
Chao-Qian Guo,
Guoqiang Lin,
YU Bao-hai
Publication year - 2017
Publication title -
destech transactions on engineering and technology research
Language(s) - English
Resource type - Journals
ISSN - 2475-885X
DOI - 10.12783/dtetr/apetc2017/11422
Subject(s) - x ray photoelectron spectroscopy , microstructure , materials science , scanning electron microscope , indentation hardness , ion plating , surface roughness , field emission microscopy , analytical chemistry (journal) , magnetic field , diffraction , metallurgy , composite material , thin film , optics , nuclear magnetic resonance , chemistry , nanotechnology , chromatography , quantum mechanics , physics
CrN films were deposited on high-speed-steel (HSS) substrates by arc ion plating. The influence of an axial magnetic field was examined with regard to the microstructure, chemical elemental composition and mechanical properties of the films. The film chemical composition, microstructure, surface morphology, surface roughness and hardness were investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscope (SEM), Surface morphology analyzer and Viker microhardness test. The results showed that the N/Cr ratio increases when the magnetic field intensity increases from 0 to 30 mT. With increasing the magnetic field intensity, the film structures change in such way: Cr2N+CrCr2N+CrNCrN. The film micro hardness increases with the magnetic field intensity. 1
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