Open AccessInfluence of Deposition Parameters and Thermal Annealing on the Structure and Properties of Nitride Coatings (TiHfZrVNb)N
Author(s) -
A.D. Pogrebnjak,
G. Abadias,
Patrick Chartier,
О. В. Бондар,
I. V. Yakuschenko,
Yoshihiko Takeda,
R. KrauseRehberg,
Д. А. Колесников,
В. М. Береснев,
J. Partyka
Publication year - 2014
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.125.1296
Subject(s) - materials science , nitride , annealing (glass) , deposition (geology) , thermal , composite material , thermodynamics , physics , geology , layer (electronics) , paleontology , sediment