Open AccessAn ESR study of bulk and interface defects in P-SiO, P-SiON, and P-SiN films on (100) Si substrates
Author(s) -
Atsushi Toki,
Yoshiaki Kamigaki
Publication year - 2008
Publication title -
ecs meeting abstracts
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2008-02/1/76
Subject(s) - materials science , interface (matter) , condensed matter physics , engineering physics , composite material , physics , wetting , sessile drop technique
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