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Mechanical Properties and Deformation of Cubic Silicon Carbide Micropillars in Compression at Room Temperature
Author(s) -
Shin Chansun,
Jin HyungHa,
Kim WeonJu,
Park JiYeon
Publication year - 2012
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2012.05346.x
Subject(s) - materials science , brittleness , composite material , silicon carbide , slip (aerodynamics) , grain boundary , crystallite , lüders band , plasticity , silicon , cracking , metallurgy , dislocation , microstructure , physics , thermodynamics
We performed microcompression tests on silicon carbide ( SiC ) pillars with diameters ranging from 4.7 down to 0.65 μm at room temperature. The SiC micropillars were fabricated from a polycrystalline 3C‐SiC plate using lithography and plasma etching. The pillars exhibited elastic loading behavior until a catastrophic brittle fracture occurred. The compressive fracture strength was found to increase with a decrease in pillar diameter. This scale dependency can be attributed to the flaw sensitivity of brittle materials, and cracking seems to start at the grain boundaries. Ductile plasticity occurred in micropillars with a diameter of 0.65 μm. Cross‐sectional transmission electron microscopy observation of the plastically deformed pillars showed that a slip occurred on the {111} planes. The critical resolved shear stress for a {111}<110> slip system was evaluated to be 4.9–7.3 GPa, which is consistent with the values obtained from numerical and theoretical studies in the literature.