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Formation and reduction of streak artefacts in electron tomography
Author(s) -
CAO M.,
ZHANG H.B.,
LU Y.,
NISHI R.,
TAKAOKA A.
Publication year - 2010
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2009.03357.x
Subject(s) - streak , interpolation (computer graphics) , projection (relational algebra) , reduction (mathematics) , computer science , computer vision , enhanced data rates for gsm evolution , artificial intelligence , iterative reconstruction , algorithm , optics , physics , mathematics , image (mathematics) , geometry
Summary We have analysed the formation of streak artefacts in the reconstruction based on the filtered back projection algorithm in electron tomography (ET) and accordingly applied an adaptive interpolation technique to artefact reduction. In the adaptive interpolation to recover the missing information, the edge positions in a projection curve were tracked to reduce the interpolation error. A simulation was used to demonstrate the effectiveness of the artefact reduction. Furthermore, image reconstruction of integrated circuit specimens in the ET experiments with the ultra‐high voltage electron microscope show that the strong streak artefacts can be reduced effectively by our artefact reduction technique.

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