Premium
Dual channel heterodyne microscope
Author(s) -
PROTOPOPOV V.
Publication year - 2010
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2009.03322.x
Subject(s) - heterodyne (poetry) , optics , microscope , phase (matter) , amplitude , heterodyne detection , contrast (vision) , resolution (logic) , physics , spatial frequency , laser , beam (structure) , image resolution , materials science , computer science , acoustics , artificial intelligence , quantum mechanics
Summary Heterodyne measurement of the amplitude and phase of a cross‐polarized two‐frequency laser beam reflected from a patterned surface enables simultaneous imaging in both the amplitude and phase‐contrast modes. Such imaging duality provides additional information for inspection. Besides, spatial resolution in the phase‐contrast mode of operation is not limited by the width of the focused beam and, therefore, may be better than that of traditional imaging techniques. This phenomenon, commonly referred to as super‐resolution, was experimentally observed.