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An innovative method to perform capacitance-to-digital conversion without requiring sensor biasing circuitry is proposed. This work is intended for the readout of MEMS capacitive microphones used in human-to-machine interface applications, where the main constraints are low power consumption and small chip area. The time-encoded sigma-delta ADC described here employs a switched-capacitor-based feedback to linearize the voltage-controlled oscillator and to couple the capacitive sensor to the readout. A prototype was fabricated to test the concept with a CMOS 130nm process. The achieved relative capacitance resolution is 14.7 bits with a rest capacitance value of   $2.575 \,\mathrm{p}\mathrm{F}$   and a total power consumption of   $343 \,\mathrm{\upmu }\mathrm{W}$  . Linearity measurements (  $\rm{SNDR}_\mathrm{peak}=51.5$  dB in the bandwidth from   $300 \,\mathrm{Hz}$   to   $6.8 \,\mathrm{k}\mathrm{Hz}$  ) are limited by the test fixture due to the nonlinearity of the varactor introduced in lieu of a testing input sensor.

A Time-Encoded Capacitance-to-Digital Converter based on a Switched-Capacitor Feedback