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This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable bipolar beams. The influence of the mechanical compliance of grippers on the attractive force that it generates is clarified by comparing two types of modules having either high or low mechanical compliances. Experiments measured the attractive force of the gripper and demonstrated the pick-and-place performance of a thin film. The results show that mechanical compliance plays an important role in mitigating the attractive force decrease in stacking modules. The grippers’ ability for thin film handling is demonstrated by observing pick-and-place behaviours of the proposed bipolar electrostatic grippers.

Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling