Open AccessFabrication of amorphous Al2O3 optical film with various refractive index and low surface roughness
Author(s) -
Yunping Lan,
Yonggang Zou,
Xiaoliang Ma,
X. Li,
Linlin Shi,
Jiabin Zhang
Publication year - 2020
Publication title -
materials research express
Language(s) - English
Resource type - Journals
ISSN - 2053-1591
DOI - 10.1088/2053-1591/abb0af
Subject(s) - materials science , refractive index , amorphous solid , surface roughness , optics , fabrication , electron beam physical vapor deposition , thin film , surface finish , optoelectronics , composite material , nanotechnology , crystallography , medicine , chemistry , physics , alternative medicine , pathology
Alumina(Al 2 O 3 ) thin film has been widely used in many applications due to its excellent properties, especially in optical films and semiconductor industries. Refractive index, amorphous property and surface roughness are essential parameters related to its applications. In this study, the fabrication method of preparing various refractive index Al 2 O 3 optical films was proposed. The Al 2 O 3 optical films were deposited at room temperature by electron beam evaporation(EBE) technique. The effects of deposition rate and post-annealed temperature on refractive index, vibration peak of molecular and atom, amorphous property and surface roughness were investigated. Refractive index ranging from 1.519 to 1.627 was realized by EBE method at different deposition rates and different post-annealed temperatures. The variable refractive index was very important in adjusting half-width of reflector band. Meanwhile, analysis showed that the suitable post-annealed temperature could not exceed 400 °C. In short, this work provided an effective approach to fabricate amorphous Al 2 O 3 optical film, which was pretty important in its applications in UV antireflection films and blue light reflection films.