Open AccessInvestigation of the electrical performance of hfo2dielectrics deposited on passivated germanium substrates
Author(s) -
Qifeng Lu,
Yifei Mu,
Yijie Zhao,
Chengzhi Zhao,
Stephen Taylor,
Paul R. Chalker
Publication year - 2017
Publication title -
iop conference series materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/201/1/012029
Subject(s) - germanium , passivation , materials science , thin film , dielectric , analytical chemistry (journal) , diffraction , annealing (glass) , chemical engineering , silicon , optoelectronics , chemistry , nanotechnology , composite material , optics , chromatography , layer (electronics) , physics , engineering
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