Open AccessTin Oxide Microheater for Chemical Sensors
Author(s) -
Mohsen Gharesi,
M. Shahnawaze Ansari
Publication year - 2016
Publication title -
iop conference series. materials science and engineering
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/108/1/012018
Subject(s) - microheater , materials science , tin oxide , tin dioxide , ohmic contact , fabrication , oxide , tin , annealing (glass) , resistor , pellets , pyrolysis , optoelectronics , sheet resistance , nanotechnology , chemical engineering , composite material , metallurgy , electrical engineering , layer (electronics) , voltage , medicine , alternative medicine , engineering , pathology