Open AccessStructural and dielectric properties of TiO2thin films deposited by the sol-gel method on Si substrates
Author(s) -
P. Vitanov,
A. Harizanova,
T. Ivanova
Publication year - 2012
Publication title -
journal of physics conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/356/1/012041
Subject(s) - materials science , raman spectroscopy , dielectric , spin coating , sol gel , thin film , crystallite , annealing (glass) , titanium dioxide , analytical chemistry (journal) , thermal stability , fourier transform infrared spectroscopy , silicon , titanium , chemical engineering , composite material , nanotechnology , metallurgy , optics , optoelectronics , chemistry , physics , engineering , chromatography
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