Open AccessIdentification and compensation of stiffness and damping between short and long stroke in wafer stage
Author(s) -
Xu Yang,
Ming Zhang,
Rong Cheng,
Rong Cheng,
Yu Zhu
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1986/1/012056
Subject(s) - disturbance (geology) , compensation (psychology) , stroke (engine) , control theory (sociology) , identification (biology) , stiffness , servo , wafer , computer science , engineering , structural engineering , mechanical engineering , control (management) , artificial intelligence , geology , paleontology , botany , psychology , electrical engineering , psychoanalysis , biology
The disturbance of cable force is an important aspect that should be taken into account for precision motion systems involved in CNC machine tools, wafer scanners, etc. In this paper, unlike paying attention to the cable force loaded on long stroke in previous works, the disturbance between long and short stroke had been analyzed in details. To minimize the disturbance force loaded on short stroke of motion system, a disturbance model identification and the corresponding compensation approach method was proposed. A two-step identification in frequency domain was developed such that the parameters of stiffness and damping between long and short stroke can be estimated. Then a state feedback method using ESO and estimated parameters had be applied to compensate the disturbance, which improved the servo performance of short stroke significantly. Finally, the effectiveness of the proposed method is illustrated through numerical simulation.