Open AccessSynthesis of ZnO: Sb thin films Dropped on glass and Porous Silicon for CO Gas Sensing
Author(s) -
Rashid Hashim Jabbar,
Shurooq Jasim Jabbar,
Warqa Adnan Shakir,
Mudar Ahmed Abdulsattar,
Israa Hadi Hilal
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1963/1/012008
Subject(s) - membrane , materials science , substrate (aquarium) , crystallite , silicon , breakage , porous glass , porosity , porous silicon , chemical engineering , crystal (programming language) , thin film , composite material , analytical chemistry (journal) , nanotechnology , optoelectronics , chemistry , metallurgy , chromatography , oceanography , computer science , engineering , biochemistry , programming language , geology
Membranes Structural properties have been studied using XRD and compare the different values of the average crystallite size by using correction equations. undoped ZnO and ZnO: Sb for (0.5- 2) % membranes has been dropped on glass and p-type porous silicon (PS) substrate at 400 °C to use it as a sensor for CO gas. The crystal growth of the films that were deposited on the PS was not uniform due to the nature of the PS surface and due to the breakage of the crystal structure of the membrane material. the sensitivity of membranes dropped on (PS) for CO gas was higher than on glass substrate.