Open AccessEnhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors
Author(s) -
Andi Setiono,
Wilson Ombati Nyang’au,
Michael Fahrbach,
Jiushuai Xu,
Maik Bertke,
Hutomo Suryo Wasisto,
Erwin Peiner
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1837/1/012003
Subject(s) - cantilever , resonance (particle physics) , phase (matter) , microelectromechanical systems , amplitude , phase response , thermal , materials science , acoustics , physics , optoelectronics , optics , atomic physics , quantum mechanics , meteorology , composite material
Unsteady frequency response of in-plane electro-thermal MEMS-based cantilever sensors can cause up-/down-shifting of the resonance phase, which becomes an inhibitive factor in resonance locking using a phase-locked loop setup. Moreover, the inconsistency of resonance phase during real-time measurement potentially causes inaccuracy in resonant-frequency locking. In this work, reference parameters are differentially subtracted from the sensor output signals to enhance the characteristic of frequency response. As a calculation result, a constant resonance phase can be successfully achieved by adjusting the reference parameters close to the sensor baseline, both in sensor amplitude and phase.