Open AccessDesign and simulation high aspect ratio torsion suspension of MEMS z-axis accelerometer
Author(s) -
Igor Lysenko,
Д В Науменко,
Ольга Александровна Ежова
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1695/1/012177
Subject(s) - accelerometer , microelectromechanical systems , torsion (gastropod) , lever , finite element method , torsion spring , suspension (topology) , structural engineering , pantograph , computer science , engineering , materials science , mechanical engineering , mathematics , optoelectronics , medicine , surgery , homotopy , pure mathematics , operating system
This paper presents new design torsion suspension of MEMS z-axis accelerometer. These prototypes Z-axis accelerometer are based on pantograph lever structure is out-of-plane devices. The results of finite element analysis of the structure are presented.