Open AccessFabrication of micro-ignition sequence based on electronics safety and arming unit
Author(s) -
Yanbai Shen,
Jianbing Xu,
Ch G Wang,
T L Yang,
Y T Wang,
Zeyv Zhang,
F W Li,
Yinghua Ye,
Ruiqi Shen
Publication year - 2020
Publication title -
journal of physics conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1507/10/102004
Subject(s) - ignition system , fabrication , microelectromechanical systems , materials science , electronics , etching (microfabrication) , electrical engineering , nanotechnology , engineering , aerospace engineering , medicine , alternative medicine , pathology , layer (electronics)
This paper describes an ignition circuit consisted of one micro igniter and one electronic security microswitch that could realize the intelligent function of micro-ignition sequence. The micro-ignition sequence, integrated with ignition circuit, chamber, nanothermite and B/KNO 3 , was fabricated on the same silicon chip by mechanical engraving and classic micro mechanical systems (MEMS) technology including magnetron sputtering and plasma etching steps. In addition, the size of micro-ignition sequence was less than 0.15 cm 3 . The electronic security microswitch based on energetic film Al/MoO 3 can implement the function of circuit switch conversion under 1.5 A during 3 ms. The paper presents the design, fabrication and test of the micro-ignition sequence integrating of electronics safety and arming unit.
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