Open AccessTraceable profilometry with a 3D nanopositioning unit and zero indicating sensors in compensation method
Author(s) -
Jörg Hoffmann,
Albert Weckenmann
Publication year - 2005
Publication title -
journal of physics conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/13/1/053
Subject(s) - profilometer , compensation (psychology) , scanner , calibration , focus (optics) , computer science , tilt sensor , accuracy and precision , acoustics , optics , engineering , artificial intelligence , physics , optical fiber , surface finish , telecommunications , psychology , quantum mechanics , psychoanalysis , mechanical engineering
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