Open AccessEffects of probe downforce and bias voltage on electrochemical atomic force microscopy nanomachining of copper materials
Author(s) -
Jiansheng Huang,
Yaozeng Hu,
Yi-Chia Liao,
Hui-Shan Chou
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1176/5/052066
Subject(s) - machining , nanoscopic scale , materials science , copper , atomic force microscopy , biasing , electrochemistry , electrolyte , voltage , oxide , electrochemical machining , nanotechnology , metallurgy , composite material , electrode , chemistry , electrical engineering , engineering