Open AccessThe analytical calibration model of temperature effects on a silicon piezoresistive pressure sensor
Author(s) -
Meng Nie,
Y Gao
Publication year - 2017
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4973333
Subject(s) - piezoresistive effect , calibration , microelectronics , materials science , pressure sensor , voltage , silicon , temperature measurement , optoelectronics , temperature gradient , pressure measurement , stress (linguistics) , modulus , electronic engineering , composite material , electrical engineering , thermodynamics , engineering , physics , quantum mechanics , philosophy , linguistics
Presently, piezoresistive pressure sensors are highly demanded for using in various microelectronic devices. The electrical behavior of these pressure sensor is mainly dependent on the temperature gradient. In this paper, various factors,which includes effect of temperature, doping concentration on the pressure sensitive resistance, package stress, and temperature on the Young’s modulus etc., are responsible for the temperature drift of the pressure sensor are analyzed. Based on the above analysis, an analytical calibration model of the output voltage of the sensor is proposed and the experimental data is validated through a suitable model
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