Quantitative SIMS of III‐V compounds of graded composition without the use of standards | Zendy

Crapper M. D. | Zendy; Chew A. | Zendy; Bradley R. H. | Zendy; Sykes D. E. | Zendy

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Quantitative SIMS of III‐V compounds of graded composition without the use of standards

Author(s) -

Crapper M. D.,

Chew A.,

Bradley R. H.,

Sykes D. E.

Publication year - 1991

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.740170403

Subject(s) - matrix (chemical analysis) , analytical chemistry (journal) , sensitivity (control systems) , chemistry , composition (language) , range (aeronautics) , matrix element , materials science , mineralogy , environmental chemistry , chromatography , composite material , physics , electronic engineering , linguistics , philosophy , particle physics , engineering

A method is proposed for obtaining the matrix element SIMS sensitivity factors for III‐V compounds of the form AB x C 1–x without using standards. This method tests for variation of sensitivities with concentration and, in the case where no strong variation is shown, allows determination of the sensitivity functions by use of samples where the concentrations of two elements vary continuously over a wide range. This method provides a no‐standards route to quantification of matrix element concentrations in SIMS depth profiles of layers with graded compositions.

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