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52.1: Invited Paper : High Performance Metal‐Oxide TFT on Flexible Plastic Substrates
Author(s) -
Shieh ChanLong,
Wang Guangming,
Musolf Juergen,
Foong Fatt,
Xiao Tian,
Yu Gang
Publication year - 2013
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2013.tb06313.x
Subject(s) - thin film transistor , substrate (aquarium) , polymer substrate , materials science , flexible display , process (computing) , optoelectronics , active matrix , computer science , nanotechnology , polymer , composite material , layer (electronics) , operating system , oceanography , geology
Active Matrix displays on light weight, non‐fragile, plastic substrates are of great interests for portable applications. One of the challenges has been device performance processed at low temperature: in both carrier mobility and operation stability. Another challenge has been a TFT process flow without rigorous alignment among patterns in different layers. In this presentation, we present a MOTFT processed at low temperature, on PEN or PET substrates, with mobility above 50 cm 2 /Vsec and with bias stability sufficient for portable display products. TFT performance over large substrate size are guaranteed by a proprietary self‐aligned process which enables large size display backpanel be made in roll‐to‐roll process with a flexible substrate.