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P‐50: Low K Acryl Resin as Planarization Layer on TFT LCD
Author(s) -
Shen Qiyu,
Chen Xu,
Guo Jian,
Taeyu Min,
Shi Dawei,
Wang Deshuai,
Qu Lianjie,
Lu Kai,
Hou Xuechen,
Sun Jian,
Wu Tao
Publication year - 2012
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2012.tb06024.x
Subject(s) - chemical mechanical planarization , liquid crystal display , materials science , layer (electronics) , process (computing) , product (mathematics) , composite material , process engineering , computer science , optoelectronics , engineering , mathematics , geometry , operating system
In this paper, acryl resin based on ADS process parameters, and its benefit on TFT LCD product is introduced. By analysis of adhesion, exposure energy, developing time, bleach energy and cure parameters, acryl resin optimized process parameters are confirmed. With JSR PC548 positive acryl resin, our ADS product achieves good surface planarization and the product logic power has a nearly 30% decrease.