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15.1: Research, Development, and Application of Crystalline Oxide Semiconductor
Author(s) -
Yamazaki Shunpei,
Koyama Jun,
Yamamoto Yoshitaka,
Okamoto Kenji
Publication year - 2012
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2012.tb05742.x
Subject(s) - semiconductor , materials science , variety (cybernetics) , oxide , optoelectronics , nanotechnology , engineering physics , computer science , engineering , metallurgy , artificial intelligence
The study of IGZO was started by Kimizuka et al. in 1985. IGZO is developed as a material for displays. We found crystalline IGZO having c‐axis alignment and have studied its application to displays, memories, processors, etc. Crystalline IGZO is expected to be used in a variety of applications.