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Mechanical and Tribological Properties of Epitaxial Cubic Boron Nitride Thin Films Grown on Diamond
Author(s) -
DeynekaDupriez N.,
Herr U.,
Fecht H.J.,
Zhang X. W.,
Yin H.,
Boyen H.G.,
Ziemann P.
Publication year - 2008
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200700305
Subject(s) - materials science , nanoindentation , epitaxy , diamond , boron nitride , substrate (aquarium) , composite material , silicon , tribology , thin film , adhesion , irradiation , nitride , nanotechnology , optoelectronics , layer (electronics) , oceanography , physics , nuclear physics , geology
Epitaxially grown c‐BN films on diamond were analyzed for their mechanical properties by applying nanoindentation and scratch experiments. Hardness and adhesion of epitaxial films on diamond was significantly improved as compared to non‐epitaxial c‐BN films on silicon. Irradiated films demonstrated even better adhesion as compared to non‐irradiated films. The friction results were interpreted considering energy dissipation due to fracture and substrate effects.