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In this paper, a silicon rich nitride-lithium niobate on insulator (SRN-LNOI)hybrid platform with waveguides and several key components is proposed. Thepropagation loss of the silicon rich nitride-lithium niobate rib-loadedwaveguide (1 um x 300 nm) is 2.6 dB/cm at 1550 nm. Passive devices, includingadiabatic power splitters, multimode interferometer based splitters,asymmetrical Mach-Zehnder interferometers and Bragg grating filters are fullydesigned and characterized. Moreover, we report the first demonstration ofMach-Zehnder modulators based on LNOI with high-speed modulation up to 120GBaud without digital compensation. Hence, the proposed platform enables highperformance passive and active devices with low loss, high integration densityand complementary metal-oxide-semiconductor technology (CMOS) compatibility,making it a promising candidate for emerging photonics integrated circuits.

Silicon rich nitride-lithium niobate on insulator platform for photonics integrated circuits