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Y2O3-BN ceramic composites were fabricated from the slurries of yttria powder with average particle size of 3~10 μm. The slurry was fabricated by mixing PVA binder, NaOH for Ph control, PEG, BN powder and Y2O3 powder. The mixed Y2O3 powders were obtained by spray drying process from the slurry. The Y2O3-BN composite specimen was shaped in size of ∅14 mm and then sintered at 1550 o C and 1600 o C, respectively. The characteristics, microstructure, purities, densities, bulk resistance, thermal expansion, hardness and plasma resistance of the Y2O3-BN composites were investigated with the function of BN contents and sintering temperature.

Microstructure and plasma resistance of Y2O3-BN composites

Microstructure and plasma resistance of Y₂O₃-BN composites