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The lamp cooling system of the exposure has effect on the exposure efficiency and device lifetime. In this paper, we performed the numerical analysis about the thermal flow in the lamp housing of the exposure apparatus for the cooling air inflow rate. We set up the velocity of cooling air of side and bottom as the independent variables because cooling performance of the lamp housing is affected by the velocity of the cooling air side and bottom. The cooling state of lamp housing depend on three dependent variables; the temperature at top mirror and exhaust gas, ellipsoidal mirror. Response surface methodology was used in order to establish the efficient cooling analysis plan. The regression equation predicting the variables temperature of lamp housing according to the cooling air velocity were drawn. The velocity of cooling air to reach the optimum temperature of the lamp housing were derived.

Numerical Analysis for Cooling Condition of a Lamp House in the Exposure Device by Response Surface Methodology