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In Subchapter 1.2, we outline the history of LPP application research up to the creation of EUPS, and in Subchapter 1.3, the characteristic of LPP sources will be explained. The ideas for making EUPS as a practical device using an LPP source is explained in Chapter 2, the history of prototype units that led to the current working unit is described in Chapter 3, and the details of the elemental technologies that configure the current working unit will be presented in Chapter 4. The new analyses methods pioneered by EUPS will be introduced in Chapter 5.

Development of EUPS for analyzing electronic states of topmost atomic layer