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An existing infrared (IR) analysis system is generally composed of infrared source, IR focusing lenses, IR detector, and optical chop-per. An optical chopper is widely used in combination with lock-in amplifier to improve the signal-to-noise ratio by periodically inter-rupting incident light beam. During recent years, a few researches on miniaturized optical chopper have been reported to apply to micro-scaled optical systems. In this paper, a micro optical chopper operated by electromagnetic actuation is proposed and applied to a min-iaturized micro-scaled optical system operating in IR spectral range. Additionally, the fabrication method of the proposed micro chopperis demonstrated. The proposed micro optical chopper is composed of the polydimethylsiloxane (PDMS) membrane, solenoid, and per-manent magnet. The permanent magnet is bonded on the PDMS membrane using an ultraviolet-activated adhesive. The operation ofthe chopper is based on the attractive and repulsive forces between permanent magnet and solenoid induced by an electrical currentflowing through the solenoid. The fabricated micro optical chopper could operate up to 200 Hz of frequency. The maximum operatingdistance of the chopper with 7 mm diameter membrane was 750µm at 100 Hz of frequency.Keywords: Optical chopper, Infrared analysis system, PDMS

Design and Fabrication of Miniaturized Optical Chopper Operated by Electromagnetic Actuation