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Optical and semiconductor products are fabricated utilizing industrial technology that is steadily progressing to nanometre accurate operations. Reliable non-invasive contact-free sensors and techniques are required to monitor in situ manufacturing parameters in parallel with product formation. The real-time evaluation and analysis of precision fabrication processes could lead to intelligent, computerized, sensor-actuated implementation, with automated compensating feedback loops to facilitate nanometre accuracy and consistently provide high quality products in abundant yield. Laser triangulation is demonstrated herewith as a versatile solution to simultaneously measure machine tool components and monitor the product in process. Optically levered reflection resolved on a nanometre resolution displacement sensor, enables the analysis of spindle axial and rotational error, stage linear error, the impact of these error-motion components on a diamond tool edge and its progression to wear, while inspecting the compliance of the product to the desired surface finish and shape. Scanning optical scatterometry is utilized to image and analyse edges, surfaces, defects, and thin film structure. This sensor technology is highly adaptable, and may be utilized in scales ranging from small μm-size to large meter-size products manufactured from a variety of materials.

Nanoscale Non-Contact Laser Measurement of Precision Machine Tooling and Optical Surfaces