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In order to decrease the dispersion of the silicon vertical slot waveguide, we propose a vertical multilayer hybrid silicon waveguide. The optical mode distribution of the multilayer waveguide is simulated by a finite element method. By a proper design of the waveguide parameters, the dispersion of waveguide can in the range of ±300 ps/nm/km in 1510-1590 nm, with one zero-group-dispersion point in the C band. This waveguide can be an alternative in on-chip nonlinear application, such as all optical signal processing.

Design the Structure of Vertical Multilayer Hybrid Silicon Waveguide to Work in Anomalous Dispersion Region