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. A comparison among three methods for the calibration of tri-axialaccelerometers, in particular MEMS, is presented in this paper, payingattention to the uncertainty assessment of each method. The first method isperformed according to the ISO 16063 standards. Two innovative methods areanalysed, both suitable for in-field application. The effects on the wholeuncertainty of the following aspects have been evaluated: the test benchperformances in realizing the reference motion, the vibration referencesensor, the geometrical parameters and the data processing techniques. Theuncertainty contributions due to the offset and the transverse sensitivityare also studied, by calibrating two different types of accelerometers, apiezoelectric one and a capacitive one, to check their effect on the accuracyof the methods under comparison. The reproducibility of methods isdemonstrated. Relative uncertainty of methods ranges from 3 to 5 %,depending on the complexity of the model and of the requested operations. Theresults appear promising for low-cost calibration of new tri-axialaccelerometers of MEMS type.

Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessment