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A new packaging method to mount a membrane-based thermal flow sensor, flushwith the surface, is presented. Therefore, a specific design for the housingis shown, which is also adaptable to other conditions. It has beenexperimentally shown that it is important to mount the sensor flush with thesurface. In addition, the experimental results are discussed. If amembrane-based thermal flow sensor is not mounted flush with the surface,vortices can occur (depending on velocity and fluid properties) or thereduction in the channel cross section plus a decrease in sensitivity have tobe taken into account

Investigations into packaging technology for membrane-based thermal flow sensors