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n this report, the bowing behavior and the state of stress in PI film during tenter heating process were predicted by a finite element method (FEM). In the FEM analysis, the authors focused especially on the first zone of tenter heating where the shrinking stress and changes in film hardness arise resulting from removal of residual solvents and chemical reaction (imidation). The analysis was carried out under the assumption that the PI film in the tenter heating was linear-elastic. From the orientation measurements of PI film, which underwent the heating at the tenter 1st zone, the angle of orientation axis at the film edges tilted approximately 45 degrees from the machine direction (MD) and became level with the transverse direction (TD) at film center. These results comparatively agreed with the direction of the maximum principal stress calculated by FEM. Moreover the FEM results revealed reverse bowing around the entrance of tenter

Prediction of Bowing Phenomenon for Polyimide Film Accompanying Reactions and Removal of Solvents During Film Heating with Tenter