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The electron drift velocity, mean energy, ionization, attachment, effective ionization coefficient, limit electrical field, and synergism of pure CHF 3 (fluoroform), pure CF 4 (tetrafluoromethane), and CHF 3 +CF 4 gas mixtures are calculated by Boltzmann equation analysis in a wide range of density normalized electrical fields (E/N). The finite difference method is used to solve the two-term approximation of the Boltzmann equation under steady-state Townsend conditions. To our knowledge, no previous electron swarm parameters of these mixtures have been published. At constant E/N values, the electron mean energies and drift velocities increase with decreasing CHF 3 content. The addition of CF 4 into the mixture increases the attachment coefficient but reduces the ionization coefficient since CF 4 is more electronegative than CHF 3 . Furthermore, the limit electrical fields increase with increasing CF 4 concentration.

Boltzmann analysis of electron swarm parameters in CHF 3 +CF 4 mixtures