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Future observatories utilizing reflection grating spectrometers for extremeultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelitygratings with both blazed groove facets and custom groove layouts that areoften fanned or feature a slight curvature. While fabrication procedurescentering on wet anisotropic etching in monocrystalline silicon produce highlyefficient blazed gratings, the precision of a nonparallel groove layout islimited by the cubic structure of the silicon crystal. This motivates thepursuit of alternative techniques to grating manufacture, namely thermallyactivated selective topography equilibration (TASTE), which uses gray-scaleelectron-beam lithography to pattern multilevel structures in resist followedby an optimized polymer thermal reflow to smooth the 3D patterns intocontinuous surface relief profiles. Using TASTE, a mold for a reflectiongrating with a periodicity of 400 nm and grooves resembling an asymmetricsawtooth was patterned in 130 nm thick poly(methyl methacrylate) resist on asilicon substrate over a 50 mm by 7.5 mm area. This structure was coated with15 nm of gold by electron-beam physical vapor deposition using titanium as anadhesion layer and then tested for EUV and SXR diffraction efficiency atbeamline 6.3.2 of the Advanced Light Source synchrotron facility. Resultsdemonstrate a quasi-blaze response characteristic of a 27 degree blaze anglewith groove facets smooth to 1.5 nm rms. Absolute peak-order efficiency rangesfrom 75% to 25%, while total relative efficiency measures gap90% across themeasured bandpass of 15.5 nm > lambda > 1.55 nm.

astrophysical journal/the astrophysical journal

Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed  Reflection Grating Fabricated by Thermally Activated Selective Topography  Equilibration