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A normal incidence ellipsometer is fabricated to measure the optical anisotropy of a small spot whose diameter is less than 8.0 μm, by adding a beam splitter and a prism to the conventional rotating analyzer type ellipsometer. The polarizing actions of the added optical components are calibrated to improve the accuracy of the anisotropy measurement. The standard deviation of the optical anisotropy factor decreased to 0.00083, and the variation of the optical anisotropy factor of rutile versus sample azimuth angle variation also decreased to 0.015, after adoption of a non-polarizing beam splitter and a quarter wavelength phase retarder, followed by removal of the optical fiber and a careful choice of measurement wavelength. Keywords: Ellipsometry, Optical anisotropy, Micro spot, TRISO, OAFOCIS codes: (240.2130) Ellipsometry and polarimetry; (120.4630) Optical inspection; (160.1190) Anisotropic optical materials; (240.0310) Thin films

han-guk gwanghak hoeji/han'gug gwanghag hoeji

Study on Polarization Characteristics of Optical Device and Improvement of Measurement Precision of Normal Incidence Ellipsometer for Measuring Optical Anisotropy of a Micro Spot