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With the expansion of the application areas of spectroscopic ellipsometry (SE), its performance enhancement has been strongly demanded to fully utilize its advantageous features [1-5]. A conventional SE scheme, however, requires a sequence of consecutive multiple measurements, thus making it impractical for real-time dynamic applications. Moreover, it employs either mechanically or electrically active elements, resulting in complicated and cumbersome systems, although it can provide extremely high precision measurement capability [6, 7]. To improve such speed limitations, various types of snapshot ellipsometry including spectroscopic ellipsometry based on interferometric techniques have been suggested for the last 40 years [8-18]. Although some of those attempts at snapshot spectroscopic ellipsometry based on an interferometric approach have opened a new possibility of commercial uses [10], most interferometric approaches suggested so far still have not met the precision and accuracy level required to compete with conventional high precision SE. The accuracy and precision of SE measurements should match strict requirements for routine process monitoring and control in the modern manufacturing industry. This requires a thorough study of all possible errors such as tool, process and environmentally induced errors. Recently, our group has proposed a novel snapshot SE scheme based on dual spectrometers by which spectral ellipsometric phase Δ(k) can be extracted [16]. The proposed snapshot SE solution based on a dual channel scheme can measure the spectral ellipsometric phase Δ(k) and can retrieve thickness of thin films in real-time speed. Nevertheless, it suffers from systematic errors caused by optical components and imperfect calibration of spectrometers used for the snapshot SE system. The typical wavelengthcalibration procedure for the spectrometer system employs one or multiple lamps with known specific spectral lines to match peak wavelength positions of each spectral line to pixels of the array detector used in the spectrometer [19, 20]. In this paper, we use a Mach-Zehnder type interInterferometric Snapshot Spectro-ellipsometry: Calibration and Systematic Error Analysis